Institution	Class 10 (nsf)	Class 100 (nsf)	Class 1000 (nsf)	Total (nsf)
University of Alberta		3,500		3,500
Auburn University - AMSTC		4,000		4,000
Brigham Young University	1,650			1,650
Boston University Photonics Center		800	1,600	3,900
University of California Berkeley (Cory Hall) Berkeley (LBNL))				~10,000 ???
University of California Davis		13,400		13,400
University of California Los Angeles		500	8,000	8,500
University of California Santa Barbara (existing lab) Santa Barbara (new lab - 2002)		3,240	3,540	~5,000 11,000
Carnegie Mellon University		1,056		4,000
Cornell University: Phillips Hall Knight Laboratory Duffield Laboratory			~1,100	~1,100 7,500 25,788 (gsf)
Georgia Institute of Technology				7,000
Harvard University		~600	~4,400	~5,000
University of Illinois (Urbana)		4,000	4,000	8,000
MIT: Integrated Circuits Laboratory Technology Research Laboratory Exploratory Materials Laboratory Space Technology Laboratory Lincoln Laboratory	2,800	2,200 1,230	1,500	6,800 3,600 1,800 1,700 very large
University of Michigan	1,000	4,000	3,000	12,000
Penn State University EMPRL Nanofabrication Facility EMPRL Microfabrication Facility	2,700			2,700 ~3,000
Purdue University				8,000
Rensselaer Polytechnic Institute		5,700		9,500
Stanford University Integrated Circuits Laboratory Ginzton Laboratory Hansen Laboratory		10,500		10,500 ??? ???
University of Texas in Arlington				8,500
University of Texas at Auston				12,000
University of Wisconsin		900		3,900
Yale University		2,600		2,600

^† These numbers are best estimates based, mainly, on careful perusal of institutional web pages. See http://deas.harvard.edu/~jones/lab_arch/nano_facilities/nano_facilities.html for reference. Unfortunately, comparisons are somewhat unreliable since it is not always clear whether gross or net square footages are being quoted and whether "gray" space is included in some tallies.